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Angebotsanfrage
1. Customer's data

Company / Institute

Department

Street

ZIP Code / City / Country

Your Name

Position

E-Mail Address

Phone

Fax
Send a copy to my E-Mail Address
2 Mask type
1x mask - master with copies
1x mask - no copies
Reticle
other: 
 
3 Material and Size
Quartz
Sodalime


Material
3x3x0.0604x4x0.0605x5x0.090
6x6x0.1206x6x0.2507x7x0.120
9x9x0.12014x14x0.12014x14x0.190
other: 
Format (inch)
ARC (antireflective Chromium)
HRC (highly reflective Chromium)

Chromium layer
no Pellicle
Chromium side
Glass side
Pellicle
further Specifications
 
4 Mask Feature Specifications
0.51.01.52.0
3.05.010.0
other: 
Minimum feature size (in µm)
±0.07±0.1±0.3±0.5±1.0
other: 

CD tolerance (in µm)
yesno
if yes:
Number of measurements:
Protocol:yesno
CD measurement
0.070.10.30.51.0
other: 
no demand to specify CD uniformity
CD uniformity (in µm)
10 nm50 nm100 nm
no demand to specify write grid

Write grid
no inspection (strip and ship)
microscope inspection (gross visual inspection)
automatic inspection (please specify defect density and defect size below)
Defect inspecion
0.2 per cm²0.5 per cm²
other: 
Defect density
0.5135
other: 
Defect size (in µm)
around 10 mm smaller than mask size
other: 
Write area
0.150.30.5
other: 
no demand to specify registration
Registration (in µm)
GDS IIAutoCAD DXFGerber
other: 



Data format
further Specifications
5 Copy Specifications
yesno

Master shipped with copies
Master to be stored at ML&C

number of copies: 
Copies
1.5 times more than on master (minimum ± 0.2 µm)
other: 



CD tolerance (in µm)
yesno
if yes:
Number of measurements: 
Protocol:yesno
CD measurement
no inspection (strip and ship)
microscope inspection (gross visual inspection)
automatic inspection (please specify defect density and defect size below)
Defect inspecion
0.2 per cm²0.5 per cm²
other: 
Defect density
0.5135
other: 
Defect size (in µm)
please enter security code :
 
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